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Please use this identifier to cite or link to this item:
http://localhost:8080/xmlui/handle/123456789/15028| Title: | Fundamental Electron Interactions with Plasma Processing Gases |
| Authors: | Loucas G. Christophorou, Loucas G. James K. Olthoff (auth.) |
| Issue Date: | 2004 |
| Publisher: | Springer US |
| URI: | http://localhost:8080/xmlui/handle/123456789/15028 |
| ISBN: | 9781441989710 |
| Appears in Collections: | 530 Physics |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Fundamental Electron Interactions with Plasma Processing Gases.pdf | 305.79 kB | Adobe PDF | View/Open |
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