SACRED HEART COLLEGE (Autonomous)
Tirupattur - 635 601, Tirupattur Dist., Tamil Nadu, IndiaAccredited by NAAC (5th cycle − under RAF) with a CGPA of 3.53/4 at 'A++' Grade, Affiliated to Thiruvalluvar University
Please use this identifier to cite or link to this item:
http://localhost:8080/xmlui/handle/123456789/14942Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Samukawa (auth.), Seiji | - |
| dc.date.accessioned | 2022-05-16T08:15:03Z | - |
| dc.date.available | 2022-05-16T08:15:03Z | - |
| dc.date.issued | 2014 | - |
| dc.identifier.isbn | 9784431547952 | - |
| dc.identifier.uri | http://localhost:8080/xmlui/handle/123456789/14942 | - |
| dc.language.iso | en | en_US |
| dc.publisher | Springer Japan | en_US |
| dc.title | Feature Profile Evolution in Plasma Processing Using On- wafer Monitoring System | en_US |
| dc.type | Book | en_US |
| Appears in Collections: | 530 Physics | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System.pdf | 305.84 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.