Please use this identifier to cite or link to this item: http://localhost:8080/xmlui/handle/123456789/12129
Title: Fundamental Electron Interactions with Plasma Processing Gases
Authors: Christophorou, Loucas G.
Olthoff (auth.), James K.
Issue Date: 2004
Publisher: Springer US
URI: http://localhost:8080/xmlui/handle/123456789/12129
ISBN: 9781441989710
Appears in Collections:0.1 Data Processing & Computer Science

Files in This Item:
File Description SizeFormat 
Fundamental Electron Interactions with Plasma Processing Gases.pdf305.79 kBAdobe PDFView/Open


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.