SACRED HEART COLLEGE (Autonomous)
Tirupattur - 635 601, Tirupattur Dist., Tamil Nadu, IndiaAccredited by NAAC (5th cycle − under RAF) with a CGPA of 3.53/4 at 'A++' Grade, Affiliated to Thiruvalluvar University
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http://localhost:8080/xmlui/handle/123456789/12046Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Samukawa (auth.), Seiji | - |
| dc.date.accessioned | 2022-04-06T10:23:26Z | - |
| dc.date.available | 2022-04-06T10:23:26Z | - |
| dc.date.issued | 2014 | - |
| dc.identifier.isbn | 9784431547952 | - |
| dc.identifier.uri | http://localhost:8080/xmlui/handle/123456789/12046 | - |
| dc.language.iso | en | en_US |
| dc.publisher | Springer Japan | en_US |
| dc.title | Feature Profile Evolution in Plasma Processing Using On- wafer Monitoring System | en_US |
| dc.type | Book | en_US |
| Appears in Collections: | 0.1 Data Processing & Computer Science | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System.pdf | 305.84 kB | Adobe PDF | View/Open |
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